Microoptical structures on top of various substrates and optoelectronic devices like VCSELs are demonstrated in a wafer-scale process combining uv-casting and lithography. Some optical properties of the replicated refractive lenses are presented.
© 2004 Optical Society of America
(250.0250) Optoelectronics : Optoelectronics
(250.7260) Optoelectronics : Vertical cavity surface emitting lasers
(350.0350) Other areas of optics : Other areas of optics
(350.3950) Other areas of optics : Micro-optics
C. Gimkiewicz, C. Zschokke, S. Obi, C. Urban, J. S. Pedersen, M. T. Gale, and M. Moser, "Wafer-scale replication of optical components on VCSEL wafers," in Optical Fiber Communication Conference, Technical Digest (CD) (Optical Society of America, 2004), paper MF52.
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