Wafer-scale replication of optical components on VCSEL wafers

Chr. Gimkiewicz; Chr. Zschokke; S. Obi; C. Urban; J. S. Pedersen; M. T. Gale; M. Moser

Optical Fiber Communication Conference
Technical Digest (CD) (Optica Publishing Group, 2004),
paper MF52

Wafer-scale replication of optical components on VCSEL wafers

Chr. Gimkiewicz, Chr. Zschokke, S. Obi, C. Urban, J. S. Pedersen, M. T. Gale, and M. Moser

Optical Fiber Communication Conference 2004

Los Angeles, California United States
ISBN: 1-55752-767-9

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C. Gimkiewicz, C. Zschokke, S. Obi, C. Urban, J. S. Pedersen, M. T. Gale, and M. Moser, "Wafer-scale replication of optical components on VCSEL wafers," in Optical Fiber Communication Conference, Technical Digest (CD) (Optica Publishing Group, 2004), paper MF52.

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Abstract

Microoptical structures on top of various substrates and optoelectronic devices like VCSELs are demonstrated in a wafer-scale process combining uv-casting and lithography. Some optical properties of the replicated refractive lenses are presented.

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