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Conference Paper
Optical Fiber Communication Conference
Los Angeles, California United States
February 22, 2004
ISBN: 1-55752-767-9
Poster Session (MF)

Wafer-scale replication of optical components on VCSEL wafers

Christiane Gimkiewicz, Christiane Zschokke, Samuel Obi, Claus Urban, Jörn S. Pedersen, Michael T. Gale, and Michael Moser

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Abstract

Microoptical structures on top of various substrates and optoelectronic devices like VCSELs are demonstrated in a wafer-scale process combining uv-casting and lithography. Some optical properties of the replicated refractive lenses are presented.

© 2004 Optical Society of America

OCIS Codes
(250.0250) Optoelectronics : Optoelectronics
(250.7260) Optoelectronics : Vertical cavity surface emitting lasers
(350.0350) Other areas of optics : Other areas of optics
(350.3950) Other areas of optics : Micro-optics

Citation
C. Gimkiewicz, C. Zschokke, S. Obi, C. Urban, J. S. Pedersen, M. T. Gale, and M. Moser, "Wafer-scale replication of optical components on VCSEL wafers," in Optical Fiber Communication Conference, Technical Digest (CD) (Optical Society of America, 2004), paper MF52.
http://www.opticsinfobase.org/abstract.cfm?URI=OFC-2004-MF52


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