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Conference Paper
Optical Fiber Communication Conference
Los Angeles, California United States
February 22, 2004
ISBN: 1-55752-767-9
Photonic Crystals (ThR)

Wavelength tuning of photonic crystal waveguides fabricated using 248-nm deep UV lithography

Yanxin Zhuang, Lars H. Frandsen, Anders Harpøth, Morten Thorhauge, Martin Kristensen, Peter I. Borel, Wim Bogaerts, and Roel Baets

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Abstract

Wavelength tuning of characteristic features of straight photonic crystal waveguides has been obtained by varying the exposure dose in deep UV lithography. The experimental results agree very well with numerical simulations.

© 2004 Optical Society of America

OCIS Codes
(130.0130) Integrated optics : Integrated optics
(130.3130) Integrated optics : Integrated optics materials
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4610) Optical design and fabrication : Optical fabrication

Citation
Y. Zhuang, L. H. Frandsen, A. Harpøth, M. Thorhauge, M. Kristensen, P. I. Borel, W. Bogaerts, and R. Baets, "Wavelength tuning of photonic crystal waveguides fabricated using 248-nm deep UV lithography," in Optical Fiber Communication Conference, Technical Digest (CD) (Optical Society of America, 2004), paper ThR2.
http://www.opticsinfobase.org/abstract.cfm?URI=OFC-2004-ThR2


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