Wavelength tuning of characteristic features of straight photonic crystal waveguides has been obtained by varying the exposure dose in deep UV lithography. The experimental results agree very well with numerical simulations.
© 2004 Optical Society of America
(130.0130) Integrated optics : Integrated optics
(130.3130) Integrated optics : Integrated optics materials
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4610) Optical design and fabrication : Optical fabrication
Y. Zhuang, L. H. Frandsen, A. Harpøth, M. Thorhauge, M. Kristensen, P. I. Borel, W. Bogaerts, and R. Baets, "Wavelength tuning of photonic crystal waveguides fabricated using 248-nm deep UV lithography," in Optical Fiber Communication Conference, Technical Digest (CD) (Optical Society of America, 2004), paper ThR2.
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