A novel Silicon micro-machined XY stage with a hybrid micro-lens for fiber optics module alignment is presented. MEMS micro-alignment method and Silicon chip design are described. Finally the micro-fabricated device performance is discussed.
© 2005 Optical Society of America
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.1140) Optical design and fabrication : Alignment
(230.0230) Optical devices : Optical devices
(230.0250) Optical devices : Optoelectronics
M. Epitaux, J. Verdiell, Y. Pétremand, W. Noell, and N. F. De Rooij, " Micro-Machined XY Stage for Fiber Optics Module Alignment," in Optical Fiber Communication Conference and Exposition and The National Fiber Optic Engineers Conference, Technical Digest (CD) (Optical Society of America, 2005), paper OThD2.
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