OSA's Digital Library

Optics InfoBase > Conference Papers > OFC > 2005 > OThD > Page OThD2 © 2005 OSA

Conference Paper
Optical Fiber Communication Conference
Anaheim, California United States
March 6, 2005
ISBN: 1-55752-784-9
MEMS (OThD)

Micro-Machined XY Stage for Fiber Optics Module Alignment

Marc Epitaux, Jean-Marc Verdiell, Yves Pétremand, Wilfried Noell, and Nicoolas F. De Rooij

View Full Text Article

Acrobat PDF (257 KB) Note that full-text PDFs from conferences typically contain 1-3 pages of content, some or all of which might be an abstract, summary, or miscellaneous items.





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations
  • Export Citation/Save Click for help

Abstract

A novel Silicon micro-machined XY stage with a hybrid micro-lens for fiber optics module alignment is presented. MEMS micro-alignment method and Silicon chip design are described. Finally the micro-fabricated device performance is discussed.

© 2005 Optical Society of America

OCIS Codes
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.1140) Optical design and fabrication : Alignment
(230.0230) Optical devices : Optical devices
(230.0250) Optical devices : Optoelectronics

Citation
M. Epitaux, J. Verdiell, Y. Pétremand, W. Noell, and N. F. De Rooij, " Micro-Machined XY Stage for Fiber Optics Module Alignment," in Optical Fiber Communication Conference and Exposition and The National Fiber Optic Engineers Conference, Technical Digest (CD) (Optical Society of America, 2005), paper OThD2.
http://www.opticsinfobase.org/abstract.cfm?URI=OFC-2005-OThD2


Sort:  Journal  |  Reset

References

References are not available for this paper.

OSA is a member of CrossRef.

CrossCheck Deposited