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  • Optical Fiber Communication Conference/National Fiber Optic Engineers Conference
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper OWQ2

Microresonators for Photonic Integrated Circuits

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Abstract

High-Q, low loss microdisks vertically coupled to buried bus waveguides were designed and fabricated using selective area deep etching with multi-level masks. The technology combines low loss waveguides with the ability to integrate active functionalities.

© 2008 Optical Society of America

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