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Conference Paper
Optical Fiber Communication Conference
San Diego, California United States
March 22-26, 2009
ISBN: 978-1-55752-865-0
Poster Session II (JThA)

Linearized Gimbal-Less Two-Axis MEMS Mirrors

Veljko Milanovic


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Gimbal-less Two-Axis MEMS single-crystal silicon mirrors provide low-power fast optical scanning up to 32° in both axes, dissipating <1 mW. Linearized driving scheme gives nearly linear voltage-angle characteristics. Mirror sizes range from 1mm to 4mm.

© 2009 Optical Society of America

OCIS Codes
(130.0130) Integrated optics : Integrated optics
(230.0230) Optical devices : Optical devices
(230.4040) Optical devices : Mirrors
(130.3990) Integrated optics : Micro-optical devices

V. Milanovic, "Linearized Gimbal-Less Two-Axis MEMS Mirrors," in Optical Fiber Communication Conference and National Fiber Optic Engineers Conference, OSA Technical Digest (CD) (Optical Society of America, 2009), paper JThA19.

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