Gimbal-less Two-Axis MEMS single-crystal silicon mirrors provide low-power fast optical scanning up to 32° in both axes, dissipating <1 mW. Linearized driving scheme gives nearly linear voltage-angle characteristics. Mirror sizes range from 1mm to 4mm.
© 2009 Optical Society of America
V. Milanovic, "Linearized Gimbal-Less Two-Axis MEMS Mirrors," in Optical Fiber Communication Conference and National Fiber Optic Engineers Conference, OSA Technical Digest (CD) (Optical Society of America, 2009), paper JThA19.