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Optics InfoBase > Conference Papers > OFC > 2009 > JThA > Page JThA19 © 2009 OSA

Conference Paper
Optical Fiber Communication Conference
San Diego, California United States
March 22-26, 2009
ISBN: 978-1-55752-865-0
Poster Session II (JThA)

Linearized Gimbal-Less Two-Axis MEMS Mirrors

Veljko Milanovic

http://dx.doi.org/10.1364/NFOEC.2009.JThA19


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Abstract

Gimbal-less Two-Axis MEMS single-crystal silicon mirrors provide low-power fast optical scanning up to 32° in both axes, dissipating <1 mW. Linearized driving scheme gives nearly linear voltage-angle characteristics. Mirror sizes range from 1mm to 4mm.

© 2009 Optical Society of America

OCIS Codes
(130.0130) Integrated optics : Integrated optics
(230.0230) Optical devices : Optical devices
(230.4040) Optical devices : Mirrors
(130.3990) Integrated optics : Micro-optical devices

Citation
V. Milanovic, "Linearized Gimbal-Less Two-Axis MEMS Mirrors," in Optical Fiber Communication Conference and National Fiber Optic Engineers Conference, OSA Technical Digest (CD) (Optical Society of America, 2009), paper JThA19.
http://www.opticsinfobase.org/abstract.cfm?URI=OFC-2009-JThA19

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