We demonstrate self-aligned approach for fabricating hybrid silicon plasmonic waveguide. The demonstrated structure provides nanoscale confinement together with propagation length of 100 microns on chip. Near-field measurements of propagation and coupling loss are presented.
© 2012 OSA
I. Goykhman, B. Desiatov, and U. Levy, "Demonstration of a Self Aligned Hybrid Silicon-Plasmonic Waveguide with Low Loss and Nanoscale Confinement," in Optical Fiber Communication Conference, OSA Technical Digest (Optical Society of America, 2012), paper JTh2A.24.
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