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Conference Paper
Optical Fiber Communication Conference
Los Angeles, California United States
March 4-8, 2012
ISBN: 978-1-55752-938-1
Symposium on Plasmonics for Optical Interconnects I: On-chip Plasmonic Integrated Circuits (OTu2D)

CMOS-compatible Plasmonic Waveguide Platform and Ring Resonator for Nanoscale Electronic-photonic Integrated Circuits

Ping Bai, Hong Son Chu, Er Ping Li, Shiyang Zhu, and Guo-Qiang Lo  »View Author Affiliations


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A plasmonic waveguide platform Cu/SiO2/Si/SiO2/Cu is developed based on metal-silica-silicon hybrid plasmonic waveguides to build various CMOS-compatible plasmonic devices. A plasmonic ring resonator (radius 910nm) is demonstrated experimentally as an example.

© 2012 OSA

OCIS Codes
(230.7370) Optical devices : Waveguides
(250.5300) Optoelectronics : Photonic integrated circuits
(250.5403) Optoelectronics : Plasmonics

P. Bai, H. S. Chu, E. P. Li, S. Zhu, and G. Lo, "CMOS-compatible Plasmonic Waveguide Platform and Ring Resonator for Nanoscale Electronic-photonic Integrated Circuits," in Optical Fiber Communication Conference, OSA Technical Digest (Optical Society of America, 2012), paper OTu2D.1.

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