Abstract
Owing to the negative thermo-optic coefficient (TOC) of titanium dioxide, the real effective modal index of Cu-TiO2-Si hybrid plasmonic waveguides can be potentially temperature independent. High-performance Cu-TiO2-Si waveguide-ring resonators (WRRs) are experimentally demonstrated on SOI platform using standard CMOS technology. TOC of the group index is measured to be ~1.09×10−4 K−1 for a WRR with 220-nm-high Si core and 58-nm-thick TiO2. TOC of the as-deposited TiO2 is estimated to ~ −1.0×10−4 K−1.
© 2013 Optical Society of America
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