We experimentally demonstrate a double-etched apodized fiber-to-waveguide grating coupler in silicon-on-insulator for high efficient coupling. The device fabricated using deep UV photolithography exhibits a coupling loss of -1.5 dB with 3-dB bandwidth of 54 nm.
© 2013 OSA
C. Li, H. Zhang, M. Yu, and G. Lo, "CMOS-Compatible Silicon Double-etched Apodized Waveguide Grating Couplers for High Efficient Coupling," in Optical Fiber Communication Conference/National Fiber Optic Engineers Conference 2013, OSA Technical Digest (online) (Optical Society of America, 2013), paper OW3F.2.
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