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Conference Paper
Optical Fiber Communication Conference
Anaheim, California United States
March 17-21, 2013
ISBN: 978-1-55752-962-6
Nanophotonics (OW3F)

CMOS-Compatible Silicon Double-etched Apodized Waveguide Grating Couplers for High Efficient Coupling

Chao Li, Huijuan Zhang, Mingbin Yu, and Guoqiang Lo  »View Author Affiliations


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We experimentally demonstrate a double-etched apodized fiber-to-waveguide grating coupler in silicon-on-insulator for high efficient coupling. The device fabricated using deep UV photolithography exhibits a coupling loss of -1.5 dB with 3-dB bandwidth of 54 nm.

© 2013 OSA

OCIS Codes
(050.2770) Diffraction and gratings : Gratings
(130.3120) Integrated optics : Integrated optics devices
(250.5300) Optoelectronics : Photonic integrated circuits

C. Li, H. Zhang, M. Yu, and G. Lo, "CMOS-Compatible Silicon Double-etched Apodized Waveguide Grating Couplers for High Efficient Coupling," in Optical Fiber Communication Conference/National Fiber Optic Engineers Conference 2013, OSA Technical Digest (online) (Optical Society of America, 2013), paper OW3F.2.

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