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Conference Paper
Optical Fiber Communication Conference
San Francisco, California United States
March 9-13, 2014
ISBN: 978-1-55752-993-0
Photodetectors (M2G)

High-speed InGaAs photodetectors with low dark current selectively grown on SOI substrate

Yu Geng, Shaoqi Feng, Yu Zhang, Kei May Lau, and Andrew W. Poon  »View Author Affiliations


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We report selective growth of high crystalline quality InGaAs photodetectors (PDs) with optimized InP/GaAs buffers on patterned SOI substrates by MOCVD. Both waveguide and normal-incidence PDs show low dark current and high-speed performance.

© 2014 OSA

OCIS Codes
(040.5160) Detectors : Photodetectors
(130.0250) Integrated optics : Optoelectronics
(130.3120) Integrated optics : Integrated optics devices

Y. Geng, S. Feng, Y. Zhang, K. M. Lau, and A. W. Poon, "High-speed InGaAs photodetectors with low dark current selectively grown on SOI substrate," in Optical Fiber Communication Conference, OSA Technical Digest (online) (Optical Society of America, 2014), paper M2G.2.

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