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Low Loss (<0.2dB per transition) CMOS Compatible Multi-Layer Si3N4-on-SOI Platform with Thermal-Optics Device Integration for Silicon Photonics

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Abstract

A multi-layer Si3N4-on-SOI platform is demonstrated, achieving <0.2dB transition loss between layers over 70nm bandwidth. 0.8dB/cm propagation loss is measured for PECVD Si3N4 waveguide at λ=1580nm. Thermal-optic micro-ring filter is also integrated on the platform.

© 2014 Optical Society of America

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