Design of afocal components for optical metrology systems

R. Gappinger; G. A. Williby; J. E. Greivenkamp; J. M. Sasian

doi:10.1364/OFT.2000.OTuC6

Optical Fabrication and Testing
OSA Technical Digest (Optica Publishing Group, 2000),
paper OTuC6
•https://doi.org/10.1364/OFT.2000.OTuC6

Design of afocal components for optical metrology systems

R. Gappinger, G. A. Williby, J. E. Greivenkamp, and J. M. Sasian

Optical Fabrication and Testing 2000

Québec City Canada
ISBN: 1-55752-637-0

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Metrology for Aspheres (OTuC)

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R. Gappinger, G. A. Williby, J. E. Greivenkamp, and J. M. Sasian, "Design of afocal components for optical metrology systems," in Optical Fabrication and Testing, OSA Technical Digest (Optica Publishing Group, 2000), paper OTuC6.

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Abstract

Optical metrology systems often use afocal telescopes to magnify or relay wavefronts. The optimization of afocal systems differs from standard lens design for imaging. The challenges include pupil definition, aberration evaluation, and merit function construction.

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