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The NIST X-ray optics CALIBration InteRferometer (XCALIBIR)

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Abstract

NIST’s next generation interferometer (XCALIBIR) is a 300mm aperture, general-purpose interferometer designed to push the limits of optical testing. In this presentation we describe the design goals and performance results of the instrument to- date.

© 2000 Optical Society of America

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