Abstract

MRF is a deterministic finishing process, with the ability to remove material on the nanometer-micrometer scales. The “tool” is a re-circulated fluid whose effective viscosity increases by 2 orders of magnitude in a magnetic field of ~8 kilogauss. The fluid delivery and magnetic field are designed to apply the fluid over a small area, thereby creating a sub-aperture polishing zone (a “spot”). The MRF process integrates the fluid delivery with a CNC machine and controlling software, allowing precise control of material removal [1-2].

© 2002 Optical Society of America