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Conference Paper
Optical Fabrication and Testing
Tucson, Arizona United States
June 3, 2002
ISBN: 1-55752-719-9
Lithography Poster Presentation (OTuD)

Technology development for DUV-DOE fabrication – Results and problems

Axel Schindler, R. Steiner, B. Dobschal, K. Rudolf, M. Burkhardt, and R. Brunner

http://dx.doi.org/10.1364/OFT.2002.OTuD1


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No abstract available.

OCIS Codes
(050.1970) Diffraction and gratings : Diffractive optics
(220.4000) Optical design and fabrication : Microstructure fabrication

Citation
A. Schindler, R. Steiner, B. Dobschal, K. Rudolf, M. Burkhardt, and R. Brunner, "Technology development for DUV-DOE fabrication – Results and problems," in Optical Fabrication and Testing, A. Sawchuk, ed., Vol. 76 of OSA Trends in Optics and Photonics Series (Optical Society of America, 2002), paper OTuD1.
http://www.opticsinfobase.org/abstract.cfm?URI=OFT-2002-OTuD1


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