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  • Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2004),
  • paper OMC1
  • https://doi.org/10.1364/OFT.2004.OMC1

Diamond Fixed Abrasive Lapping of Brittle Substrates

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Abstract

Advances in a new slurry-free diamond fixed abrasive technology developed by 3M for lapping of brittle substrates are reviewed. Results on brittle substrates such as glass, ceramics, CaF2, ZnSe, SiC, and sapphire are presented.

© 2004 Optical Society of America

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