Deterministic surface finishing using small-spot ion-beam figuring combined with stitching interferometry surface shape measurements for the enhanced lateral resolution have been developed to achieve 20marcsec slope-error on a 100mm flat Si synchrotron beam line optic.
© 2004 Optical Society of America
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4610) Optical design and fabrication : Optical fabrication
(340.0340) X-ray optics : X-ray optics
(340.7470) X-ray optics : X-ray mirrors
T. Hänsel, A. Nickel, A. Schindler, and H. Thomas, "Ion beam figuring surface finishing of X-ray and synchrotron beam line optics using stitching interferometry for the surface topology measurement," in Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing, OSA Technical Digest (CD) (Optical Society of America, 2004), paper OMD5.