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  • Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2004),
  • paper OTuA2
  • https://doi.org/10.1364/OFT.2004.OTuA2

Development of New Synthetic Optical Polishing Pitches

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Abstract

Amorphous polymers, formulated with specific additives, are shown to display viscous creep enabling application as synthetic polishing pitches. Characterization of creep, and formulation to match traditional pitch performance, are discussed.

© 2004 Optical Society of America

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