In-process surface measurement using the iTIRM principle is used for the optimisation and study of finishing processes and the analysis of contaminated polishing processes. Furthermore, its possible application to detect scratch and dig is demonstrated.
© 2004 Optical Society of America
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.5450) Optical design and fabrication : Polishing
M. Meeder and O. Faehnle, "Applications of iTIRM," in Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing, OSA Technical Digest (CD) (Optical Society of America, 2004), paper OTuC3.