Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
  • Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2004),
  • paper OTuD3
  • https://doi.org/10.1364/OFT.2004.OTuD3

Advances in micro-lens surface metrology: the role of retrace errors

Not Accessible

Your library or personal account may give you access

Abstract

The random ball test is employed for self-calibration of micro-refractive lens measurements. It is shown that interferometer aberrations lead to retrace errors, which are a strong function of test part curvature on the micro-scale.

© 2004 Optical Society of America

PDF Article
More Like This
Ray-Trace Simulation of the Random Ball Test to Improve Interferometric Microlens Metrology

Neil W. Gardner and Angela Davies
OFMD4 Optical Fabrication and Testing (OF&T) 2006

Measurement advances for micro-refractive fabrication

Angela Davies, Brent Bergner, and Neil Gardner
XWA2 Optical Fabrication and Testing (OF&T) 2004

Measurement advances for micro-refractive fabrication

Angela Davies, Brent Bergner, and Neil Gardner
XWA2 Diffractive Optics and Micro-Optics (DOMO) 2004

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved