The random ball test is employed for self-calibration of micro-refractive lens measurements. It is shown that interferometer aberrations lead to retrace errors, which are a strong function of test part curvature on the micro-scale.
© 2004 Optical Society of America
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(350.3950) Other areas of optics : Micro-optics
N. W. Gardner and A. Davies, "Advances in micro-lens surface metrology: The role of retrace errors," in Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing, OSA Technical Digest (CD) (Optical Society of America, 2004), paper OTuD3.
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