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Conference Paper
Optical Fabrication and Testing
Rochester, New York United States
October 10, 2004
ISBN: 1-55752-779-2
Testing (OTuD)

Advances in micro-lens surface metrology: The role of retrace errors

Neil W. Gardner and Angela Davies

http://dx.doi.org/10.1364/OFT.2004.OTuD3


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Abstract

The random ball test is employed for self-calibration of micro-refractive lens measurements. It is shown that interferometer aberrations lead to retrace errors, which are a strong function of test part curvature on the micro-scale.

© 2004 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(350.3950) Other areas of optics : Micro-optics

Citation
N. W. Gardner and A. Davies, "Advances in micro-lens surface metrology: The role of retrace errors," in Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing, OSA Technical Digest (CD) (Optical Society of America, 2004), paper OTuD3.
http://www.opticsinfobase.org/abstract.cfm?URI=OFT-2004-OTuD3


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