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Conference Paper
Optical Fabrication and Testing
Rochester, New York United States
October 10, 2006
ISBN: 1-55752-818-7
OF&T Main Poster Session (OFMC)

Estimation of Numerical Aperture Effect on the Basis of Measured Pupil Function of Mirau-type Objective

Takuma Doi, Tomizo Kurosawa, and Takeshi Hatsuzawa


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Effect of numerical aperture is theoretically estimated on the basis of the measured pupil function of Mirau-type objective. The discrepancies of numerical aperture factor between theoretical calculations and measured values are less than 0.6%.

© 2006 Optical Society of America

OCIS Codes
(110.0110) Imaging systems : Imaging systems
(110.1220) Imaging systems : Apertures
(180.0180) Microscopy : Microscopy
(180.3170) Microscopy : Interference microscopy

T. Doi, T. Kurosawa, and T. Hatsuzawa, "Estimation of Numerical Aperture Effect on the Basis of Measured Pupil Function of Mirau-type Objective," in Frontiers in Optics, OSA Technical Digest (CD) (Optical Society of America, 2006), paper OFMC4.

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