Effect of numerical aperture is theoretically estimated on the basis of the measured pupil function of Mirau-type objective. The discrepancies of numerical aperture factor between theoretical calculations and measured values are less than 0.6%.
© 2006 Optical Society of America
T. Doi, T. Kurosawa, and T. Hatsuzawa, "Estimation of Numerical Aperture Effect on the Basis of Measured Pupil Function of Mirau-type Objective," in Frontiers in Optics, OSA Technical Digest (CD) (Optical Society of America, 2006), paper OFMC4.
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