This paper describes a method in which the overall geometry and form errors of each lens in a microlens array are measured simultaneously by the use of a planar wave.
© 2006 Optical Society of America
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication
(220.4840) Optical design and fabrication : Testing
D. Purcell, A. Suratkar, A. Davies, and F. Farahi, "Measuring the Wavefront Distortion of a Microlens Array Using an Index Matching Liquid," in Frontiers in Optics, OSA Technical Digest (CD) (Optical Society of America, 2006), paper OFMD2.
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