Measuring a nanometer-precision asphere with subaperture stitching interferometry

Jon F. Fleig; Paul E. Murphy

doi:10.1364/OFT.2006.OFTuA6

Frontiers in Optics
OSA Technical Digest (CD) (Optica Publishing Group, 2006),
paper OFTuA6
•https://doi.org/10.1364/OFT.2006.OFTuA6

Measuring a nanometer-precision asphere with subaperture stitching interferometry

Jon F. Fleig and Paul E. Murphy

Optical Fabrication and Testing 2006

Rochester, New York United States
9–11 October 2006
ISBN: 1-55752-818-7

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Fabrication and Testing of Aspheres (OFTuA)

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J. F. Fleig and P. E. Murphy, "Measuring a nanometer-precision asphere with subaperture stitching interferometry," in Frontiers in Optics, OSA Technical Digest (CD) (Optica Publishing Group, 2006), paper OFTuA6.

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Abstract

An aspheric mirror with rms figure error of ~5 nm rms was measured using the SSI-A™ system. The measurements agreed well with null measurements of the same surface, and have improved lateral resolution as well.

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