The surface is scanned along its symmetry axis in a Fizeau cavity with spherical reference surface. The coordinates x,y,z at the (moving) zone of normal incidence are derived from simultaneous phase-measurements at apex and zone.
© 2006 Optical Society of America
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
M. Kuechel, "Absolute Measurement of Rotationally Symmetric Aspheric Surfaces," in Frontiers in Optics, OSA Technical Digest (CD) (Optical Society of America, 2006), paper OFTuB5.
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