Recent research and development work in the ductile machining technology for semiconductors and crystalline materials is reviewed. The latest applications of ductile machining to the fabrication of infrared optical elements and semiconductor substrates are introduced.
© 2006 Optical Society of America
(160.0160) Materials : Materials
(160.4670) Materials : Optical materials
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4610) Optical design and fabrication : Optical fabrication
J. Yan and T. Kuriyagawa, "Recent Nano-Precision Ductile Machining Technology for Advanced Optical Applications," in Frontiers in Optics, OSA Technical Digest (CD) (Optical Society of America, 2006), paper OFTuD4.
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