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Mini-Fizeau Interferometer for Curvature Sensing in the NIST Geometry Measuring Machine

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Abstract

We describe the design of a miniature Fizeau interferometer, which is intended to be an accurate curvature sensor for the NIST Geometry Measuring Machine (GEMM), which is used to measure aspheric and free form surfaces. The interferometer was designed for simultaneous measurements of figure and the distance between the sensor and part under test.

© 2006 Optical Society of America

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