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Conference Paper
Optical Fabrication and Testing
Rochester, New York United States
October 21-24, 2008
ISBN: 978-1-55752-861-2
Joint META/OF&T Poster Session (JWD)

Ultra-Fast Self-Corrected PEM Ellipsometry

Hsiu-Ming Tsai, Leng-Chun Chen, and Yu-Faye Chao

http://dx.doi.org/10.1364/OFT.2008.JWD11


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Abstract

A self-corrected method is proposed for PEM ellipsometry. This algorithm can eliminate errors caused by the temporal deviation (x) and achieve δψ~0.14° and δΔ~0.25° in 20μs, respectively.

© 2008 The Optical Society

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation

Citation
H. Tsai, L. Chen, and Y. Chao, "Ultra-Fast Self-Corrected PEM Ellipsometry," in Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing, OSA Technical Digest (CD) (Optical Society of America, 2008), paper JWD11.
http://www.opticsinfobase.org/abstract.cfm?URI=OFT-2008-JWD11


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