A self-corrected method is proposed for PEM ellipsometry. This algorithm can eliminate errors caused by the temporal deviation (x) and achieve δψ~0.14° and δΔ~0.25° in 20μs, respectively.
© 2008 The Optical Society
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
H. Tsai, L. Chen, and Y. Chao, "Ultra-Fast Self-Corrected PEM Ellipsometry," in Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing, OSA Technical Digest (CD) (Optical Society of America, 2008), paper JWD11.
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