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Conferences > OFT > 2008 > OFA > OFA4
  • Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper OFA4
  • •https://doi.org/10.1364/OFT.2008.OFA4

Contributions of Kinematics and Viscoelastic Lap Deformation on the Surface Figure during Full Aperture Polishing of Fused Silica

T. Suratwala, R. Steele, and M. Feit

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Abstract

The effects of kinematics and lap viscoelastic properties have been quantitatively correlated to a revised Preston Model by monitoring the surface figure and material removal rate during fused silica polishing (ceria on pad or pitch).

© 2008 Optical Society of America

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