We describe ultra precise figure error correction of small optics down to the sub-nm RMS level as well as for a time-saving figure error correction with nm-RMS accuracy by using the new IBF-100 plant.
© 2008 The Optical Society
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4610) Optical design and fabrication : Optical fabrication
(350.0350) Other areas of optics : Other areas of optics
(350.3850) Other areas of optics : Materials processing
T. Franz and T. Hänsel, "Ion Beam Figuring (IBF) Solutions for the Correction of Surface Errors of Small High Performance Optics," in Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing, OSA Technical Digest (CD) (Optical Society of America, 2008), paper OThC7.
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