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Conference Paper
Optical Fabrication and Testing
Rochester, New York United States
October 21-24, 2008
ISBN: 978-1-55752-861-2
Keynote Session on Mid-Spatial Frequencies and PSD (OTuA)

Characterization of Surface and Thin-Film Roughness Using PSD Functions

Angela Duparré

http://dx.doi.org/10.1364/OFT.2008.OTuA5


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Abstract

Power Spectral Density functions obtained from measurements at different spatial frequency ranges and by different techniques are combined to yield comprehensive descriptions of surface structures.

© 2008 The Optical Society

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(240.0240) Optics at surfaces : Optics at surfaces
(240.5770) Optics at surfaces : Roughness

Citation
A. Duparré, "Characterization of Surface and Thin-Film Roughness Using PSD Functions," in Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing, OSA Technical Digest (CD) (Optical Society of America, 2008), paper OTuA5.
http://www.opticsinfobase.org/abstract.cfm?URI=OFT-2008-OTuA5


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