Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
  • Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper OWC1
  • https://doi.org/10.1364/OFT.2008.OWC1

Progress in Laser-Induced Backside Wet Etching

Not Accessible

Your library or personal account may give you access

Abstract

We have investigated a one-step method to fabricate a microstructure on a silica glass plate by using laser-induced backside wet etching (LIBWE) that consists of excimer laser mask projection system and diode-pumped solid state (DPSS) laser beam scanning system. Well-defined deep microtrenches without crack formations on a fused silica glass plate were fabricated by LIBWE method with the UV lasers. We have demonstrated the micro- fabrication of pits-array and patterned grating on the surface of silica glass plates by LIBWE method at 248 nm and 266 nm with dye solutions. The two new systems allow us to use rapid prototyping of high precision surface microfabrication of silica glass as laser direct-write processing.

© 2008 Optical Society of America

PDF Article
More Like This
Fabrication of deep microtrenches with inclined parts by laser-induced backside wet etching

Tadatake Sato, Ryozo Kurosaki, Yoshizo Kawaguchi, Aiko Narazaki, and Hiroyuki Niino
TuJ3_3 Conference on Lasers and Electro-Optics/Pacific Rim (CLEO/PR) 2009

Nanotexturing of Glass Surface by Ultrafast Laser Assisted Wet Etching

Rokas Drevinskas, Mindaugas Gecevičius, Martynas Beresna, Yves Bellouard, and Peter G. Kazansky
AM1L.2 CLEO: Applications and Technology (CLEO:A&T) 2014

Grating fabrication in dielectric coatings by TWIN-LIBWE

C. Vass, B. Kiss, Á. Sipos, F. Újhelyi, P. Dombi, and K. Osvay
CM_P8 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2011

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved