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Conference Paper
Optical Fabrication and Testing
Rochester, New York United States
October 21-24, 2008
ISBN: 978-1-55752-861-2
Micro/Integrated Optics (OWC)

Progress in Laser-Induced Backside Wet Etching

Hiroyuki Niino

http://dx.doi.org/10.1364/OFT.2008.OWC1


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Abstract

One-step method to fabricate surface microstructures on silica-glass plates using LIBWE is reviewed. Well-defined deep microtrenches without crack formations were fabricated with ns-pulsed laser beam of point-focused DPSS UV laser and mask-patterned KrF excimer laser.

© 2008 The Optical Society

OCIS Codes
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication
(240.0240) Optics at surfaces : Optics at surfaces
(240.3990) Optics at surfaces : Micro-optical devices

Citation
H. Niino, "Progress in Laser-Induced Backside Wet Etching," in Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing, OSA Technical Digest (CD) (Optical Society of America, 2008), paper OWC1.
http://www.opticsinfobase.org/abstract.cfm?URI=OFT-2008-OWC1


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