One-step method to fabricate surface microstructures on silica-glass plates using LIBWE is reviewed. Well-defined deep microtrenches without crack formations were fabricated with ns-pulsed laser beam of point-focused DPSS UV laser and mask-patterned KrF excimer laser.
© 2008 The Optical Society
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication
(240.0240) Optics at surfaces : Optics at surfaces
(240.3990) Optics at surfaces : Micro-optical devices
H. Niino, "Progress in Laser-Induced Backside Wet Etching," in Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing, OSA Technical Digest (CD) (Optical Society of America, 2008), paper OWC1.
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