OSA's Digital Library

Optics InfoBase > Conference Papers > OFT > 2008 > OWC > Page OWC1 © 2008 OSA

Conference Paper
Optical Fabrication and Testing
Rochester, New York United States
October 21-24, 2008
ISBN: 978-1-55752-861-2
Micro/Integrated Optics (OWC)

Progress in Laser-Induced Backside Wet Etching

Hiroyuki Niino


View Full Text Article

Acrobat PDF (846 KB) Note that full-text PDFs from conferences typically contain 1-3 pages of content, some or all of which might be an abstract, summary, or miscellaneous items.

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

  • Export Citation/Save Click for help


One-step method to fabricate surface microstructures on silica-glass plates using LIBWE is reviewed. Well-defined deep microtrenches without crack formations were fabricated with ns-pulsed laser beam of point-focused DPSS UV laser and mask-patterned KrF excimer laser.

© 2008 The Optical Society

OCIS Codes
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.4000) Optical design and fabrication : Microstructure fabrication
(240.0240) Optics at surfaces : Optics at surfaces
(240.3990) Optics at surfaces : Micro-optical devices

H. Niino, "Progress in Laser-Induced Backside Wet Etching," in Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing, OSA Technical Digest (CD) (Optical Society of America, 2008), paper OWC1.

Sort:  Journal  |  Reset


References are not available for this paper.

OSA is a member of CrossRef.

CrossCheck Deposited