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Optica Publishing Group
  • Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper OWC3
  • https://doi.org/10.1364/OFT.2008.OWC3

Dual source microscope for the inspection of micro-optics

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Abstract

A dual light source microscope is described that can measure the first order optical properties of microlenses as well as centering and wavefront quality while simultaneously inspecting the surfaces for beauty defects.

© 2008 Optical Society of America

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