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Optica Publishing Group
  • Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper OWD7
  • https://doi.org/10.1364/OFT.2008.OWD7

Parametric model for mirror deflection with axial support

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Abstract

In this study, we verified the effectiveness of the parametric model to estimate the surface RMS due to the mirror deflection. The parametric model based on the 4 empirical equations was derived from the FEA simulations. We can effectively estimate the surface RMS (‘total’ and ‘after power removed’) within 8% accuracy using the parametric model.

© 2008 Optical Society of America

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