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Conference Paper
Optical Fabrication and Testing
Jackson Hole, Wyoming United States
June 13-17, 2010
ISBN: 978-1-55752-893-3
Specification and Measurement (OTuA)

Roughness Measurement of Ultra Precision Surfaces using Light Scattering Techniques and Analysis

Tobias Herffurth, Sven Schröder, Marcus Trost, and Angela Duparré


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Light scattering techniques are used as powerful method for roughness measurements. Recent achievements in characterizing even large and curved surfaces are presented.

© 2010 OSA

OCIS Codes
(240.0240) Optics at surfaces : Optics at surfaces
(240.5770) Optics at surfaces : Roughness
(290.0290) Scattering : Scattering
(290.5820) Scattering : Scattering measurements

T. Herffurth, S. Schröder, M. Trost, and A. Duparré, "Roughness Measurement of Ultra Precision Surfaces using Light Scattering Techniques and Analysis," in International Optical Design Conference and Optical Fabrication and Testing , OSA Technical Digest (CD) (Optical Society of America, 2010), paper OTuA5.

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