Light scattering techniques are used as powerful method for roughness measurements. Recent achievements in characterizing even large and curved surfaces are presented.
© 2010 OSA
T. Herffurth, S. Schröder, M. Trost, and A. Duparré, "Roughness Measurement of Ultra Precision Surfaces using Light Scattering Techniques and Analysis," in International Optical Design Conference and Optical Fabrication and Testing , OSA Technical Digest (CD) (Optical Society of America, 2010), paper OTuA5.
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