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Conferences > OFT > 2010 > OTuC > OTuC5
  • International Optical Design Conference and Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2010),
  • paper OTuC5
  • •https://doi.org/10.1364/OFT.2010.OTuC5

Maskless Lithography Tool for Fabrication and Inspection of Diffractive Optical Elements and Computer Generated Holograms

M. Zaverton, J. Sierchio, Y. S. Kim, D. Hansen, W. Bletcher, J. Tamkin, and T. D. Milster

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Abstract

A high-speed maskless lithography tool is described for fabricating diffractive optical elements and computer generated holograms. The system has the capability to write gray-scale features is also used for inspection of the sample after fabrication.

© 2010 OSA, SPIE

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