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Optics InfoBase > Conference Papers > OFT > 2010 > OTuC > Page OTuC5 © 2010 OSA

Conference Paper
Optical Fabrication and Testing
Jackson Hole, Wyoming United States
June 13-17, 2010
ISBN: 978-1-55752-893-3
Laser Writing in Materials (OTuC)

Maskless Lithography Tool for Fabrication and Inspection of Diffractive Optical Elements and Computer Generated Holograms

Melissa A. Zaverton, Justin Sierchio, Young-Sik Kim, Delbert Hansen, Warren Bletcher, John Tamkin, and Thomas Milster

http://dx.doi.org/10.1364/OFT.2010.OTuC5


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Abstract

A high-speed maskless lithography tool is described for fabricating diffractive optical elements and computer-generated holograms. The system has the capability to write gray-scale features and is also used for inspection of the sample after fabrication.

© 2010 OSA

OCIS Codes
(090.0090) Holography : Holography
(090.1760) Holography : Computer holography
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.3740) Optical design and fabrication : Lithography

Citation
M. A. Zaverton, J. Sierchio, Y. Kim, D. Hansen, W. Bletcher, J. Tamkin, and T. Milster, "Maskless Lithography Tool for Fabrication and Inspection of Diffractive Optical Elements and Computer Generated Holograms," in International Optical Design Conference and Optical Fabrication and Testing , OSA Technical Digest (CD) (Optical Society of America, 2010), paper OTuC5.
http://www.opticsinfobase.org/abstract.cfm?URI=OFT-2010-OTuC5

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