A high-speed maskless lithography tool is described for fabricating diffractive optical elements and computer-generated holograms. The system has the capability to write gray-scale features and is also used for inspection of the sample after fabrication.
© 2010 OSA
(090.0090) Holography : Holography
(090.1760) Holography : Computer holography
(220.0220) Optical design and fabrication : Optical design and fabrication
(220.3740) Optical design and fabrication : Lithography
M. A. Zaverton, J. Sierchio, Y. Kim, D. Hansen, W. Bletcher, J. Tamkin, and T. Milster, "Maskless Lithography Tool for Fabrication and Inspection of Diffractive Optical Elements and Computer Generated Holograms," in International Optical Design Conference and Optical Fabrication and Testing , OSA Technical Digest (CD) (Optical Society of America, 2010), paper OTuC5.