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Optica Publishing Group
  • International Optical Design Conference and Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2010),
  • paper OWA4
  • https://doi.org/10.1364/OFT.2010.OWA4

A new method of damage determination: 3D metrology

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Abstract

This paper present a new approach to measure damage created by the grinding operation. It presents the Abbott-Firestone curve and the depth distribution used to take information on the damage created under the surface.

© 2010 OSA, SPIE

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