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Conference Paper
Optical Fabrication and Testing
Monterey, California United States
June 24-28, 2012
ISBN: 1-55752-947-7
Optical Testing I (OTu1D)

Light scattering-based measurement of relevant surface roughness

Sven Schröder, Marcus Trost, Luisa Coriand, and Angela Duparré  »View Author Affiliations


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Light scattering measurements are used to determine surface PSD functions and application-specific roughness values in different relevant spatial frequency ranges. A new method is presented for area covering investigations of the high-spatial frequency roughness.

© 2012 OSA

OCIS Codes
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(220.5450) Optical design and fabrication : Polishing
(290.5880) Scattering : Scattering, rough surfaces

S. Schröder, M. Trost, L. Coriand, and A. Duparré, "Light scattering-based measurement of relevant surface roughness," in Imaging and Applied Optics Technical Papers, OSA Technical Digest (online) (Optical Society of America, 2012), paper OTu1D.2.

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