Light scattering-based measurement of relevant surface roughness

Sven Schröder; Marcus Trost; Luisa Coriand; Angela Duparré

doi:10.1364/OFT.2012.OTu1D.2

Imaging and Applied Optics Technical Papers
OSA Technical Digest (online) (Optica Publishing Group, 2012),
paper OTu1D.2
•https://doi.org/10.1364/OFT.2012.OTu1D.2

Light scattering-based measurement of relevant surface roughness

Sven Schröder, Marcus Trost, Luisa Coriand, and Angela Duparré

Optical Fabrication and Testing 2012

Monterey, California United States
24–28 June 2012
ISBN: 1-55752-947-7

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Optical Testing I (OTu1D)

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S. Schröder, M. Trost, L. Coriand, and A. Duparré, "Light scattering-based measurement of relevant surface roughness," in Imaging and Applied Optics Technical Papers, OSA Technical Digest (online) (Optica Publishing Group, 2012), paper OTu1D.2.

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Abstract

Light scattering measurements are used to determine surface PSD functions and application-specific roughness values in different relevant spatial frequency ranges. A new method is presented for area covering investigations of the high-spatial frequency roughness.

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