Tutorial on Recent Advances in Ion Beam and Plasma Jet Processing

A. Schindler

doi:10.1364/OFT.2012.OW4D.1

Imaging and Applied Optics Technical Papers
OSA Technical Digest (online) (Optica Publishing Group, 2012),
paper OW4D.1
•https://doi.org/10.1364/OFT.2012.OW4D.1

Tutorial on Recent Advances in Ion Beam and Plasma Jet Processing

A. Schindler

Optical Fabrication and Testing 2012

Monterey, California United States
24–28 June 2012
ISBN: 1-55752-947-7

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OF&T Postdeadline Paper (OW4D)

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A. Schindler, "Tutorial on Recent Advances in Ion Beam and Plasma Jet Processing," in Imaging and Applied Optics Technical Papers, OSA Technical Digest (online) (Optica Publishing Group, 2012), paper OW4D.1.

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Abstract

The Tutorial will highlight recent advances achieved in R&D of Ion beam figuring (IBF), ion Beam Smoothing (IBS), Reactive Ion Beam Etching (RIBE) and atmospheric Plasma Jet Machining (PJM) (deep aspherization, nanometer shape correction, smoothing, film deposition) at IOM Leipzig.

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