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Optical interferometry for 3D surface profiling of freeform optics

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Abstract

As a summary version of the authors’ previous report of Ref 1, we describe a new variant of lateral shearing interferometer with a tunable laser source that enable us to measure 3D surface profile of freeform optics with high speed, high vertical resolution, large departure, and large field-of-view.

© 2014 Optical Society of America

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