As a summary version of the authors’ previous report of Ref 1, we describe a new variant of lateral shearing interferometer with a tunable laser source that enable us to measure 3D surface profile of freeform optics with high speed, high vertical resolution, large departure, and large field-of-view.
© 2014 OSA
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
Y. Ghim, H. Rhee, A. D. Davies, H. Yang, and Y. Lee, "Optical interferometry for 3D surface profiling of freeform optics," in Classical Optics 2014, OSA Technical Digest (online) (Optical Society of America, 2014), paper JTu5A.2.
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