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Optics InfoBase > Conference Papers > OFT > 2014 > OM3C > Page OM3C.1 © 2014 OSA

Conference Paper
Optical Fabrication and Testing
Kohala Coast, Hawaii United States
June 22-26, 2014
ISBN: 978-1-55752-747-9
Testing I (OM3C)

A 2 D high accuracy slope measuring system based on a Stitching Shack Hartmann Optical Head

Mourad Idir and Guillaume Dovillaire  »View Author Affiliations


http://dx.doi.org/10.1364/OFT.2014.OM3C.1


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Abstract

We present a 2D Slope measuring System based on a Stitching Shack Hartmann Optical Head aiming to perform high accuracy optical metrology for X-ray mirrors needed for synchrotrons or Free electrons Lasers.

© 2014 OSA

OCIS Codes
(120.3940) Instrumentation, measurement, and metrology : Metrology
(340.0340) X-ray optics : X-ray optics
(340.7470) X-ray optics : X-ray mirrors

Citation
M. Idir and G. Dovillaire, "A 2 D high accuracy slope measuring system based on a Stitching Shack Hartmann Optical Head," in Classical Optics 2014, OSA Technical Digest (online) (Optical Society of America, 2014), paper OM3C.1.
http://www.opticsinfobase.org/abstract.cfm?URI=OFT-2014-OM3C.1


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