Form measurement with the sphere interferometers of PTB

Guido Bartl; Michael Krystek; Torsten Mai; Arnold Nicolaus; Andreas Peter; Reiner Spolaczyk

doi:10.1364/OFT.2014.OTh3B.3

Classical Optics 2014
OSA Technical Digest (online) (Optica Publishing Group, 2014),
paper OTh3B.3
•https://doi.org/10.1364/OFT.2014.OTh3B.3

Form measurement with the sphere interferometers of PTB

Guido Bartl, Michael Krystek, Torsten Mai, Arnold Nicolaus, Andreas Peter, and Reiner Spolaczyk

Optical Fabrication and Testing 2014

Kohala Coast, Hawaii United States
22–26 June 2014
ISBN: 978-1-55752-747-9

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Testing III (OTh3B)

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G. Bartl, M. Krystek, T. Mai, A. Nicolaus, A. Peter, and R. Spolaczyk, "Form measurement with the sphere interferometers of PTB," in Classical Optics 2014, OSA Technical Digest (online) (Optica Publishing Group, 2014), paper OTh3B.3.

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Abstract

A special interferometer was developed which allows very accurate characterizations of spheres. It enables the determination of diameters, form deviations and roundness. The uncertainty depends on the spheres’ quality (typically in the order of 1 nm).

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