Mechanisms &amp; Control of Surface Figure &amp; Roughness during Pad Polishing

T. Suratwala; R. Steele; M. Feit; R. Dylla-Spears; R. Desjardin; D. Mason; L. Wong; P. Geraghty; P. Miller; N. Shen

doi:10.1364/OFT.2014.OTu2B.1

Classical Optics 2014
OSA Technical Digest (online) (Optica Publishing Group, 2014),
paper OTu2B.1
•https://doi.org/10.1364/OFT.2014.OTu2B.1

Mechanisms & Control of Surface Figure & Roughness during Pad Polishing

T. Suratwala, R. Steele, M. Feit, R. Dylla-Spears, R. Desjardin, D. Mason, L. Wong, P. Geraghty, P. Miller, and N. Shen

Optical Fabrication and Testing 2014

Kohala Coast, Hawaii United States
22–26 June 2014
ISBN: 978-1-55752-747-9

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Figuring, Finishing and Cleaning (OTu2B)

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T. Suratwala, R. Steele, M. Feit, R. Dylla-Spears, R. Desjardin, D. Mason, L. Wong, P. Geraghty, P. Miller, and N. Shen, "Mechanisms & Control of Surface Figure & Roughness during Pad Polishing," in Classical Optics 2014, OSA Technical Digest (online) (Optica Publishing Group, 2014), paper OTu2B.1.

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Abstract

Progress on understanding phenomena influencing surface figure and roughness during pad polishing are reviewed, followed by a description of a new Convergent Polishing process allowing single iteration, process variation-free finishing of optical flats & spheres.

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