Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Dual magnetron sputtering for optical coatings

Open Access Open Access

Abstract

Dual Magnetron sputtering is applied for deposition of optical multilayers in a vertical in-line coater. The reactive sputter process for SiO2, TiO2 and Nb2O5 films is controlled by PEM. Single and multiple pass mode are considered with regard to the productivity.

© 2001 Optical Society of America

PDF Article
More Like This
On-line control of the deposition of optical coatings by magnetron sputtering

Matthias List, Christian Melde, Christoph Köckert, and Claus Illgen
TuE7 Optical Interference Coatings (OIC) 2004

Optical coatings for ophthalmic lenses by reactive magnetron sputtering

Michael Walls
ThD1 Optical Interference Coatings (OIC) 2001

Reactive Magnetron Sputter Technologies for Precision Optical Coatings

Peter Frach, Hagen Bartzsch, Daniel Gloess, Kerstin Taeschner, and Joern-Steffen Liebig
ThB.7 Optical Interference Coatings (OIC) 2013

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved