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Conference Paper
Optical Interference Coatings
Banff Canada
July 15, 2001
ISBN: 1-55752-682-6
Deposition of Optical Coatings III (MD)

Review of cathodic arc depositon

Michael Fulton

http://dx.doi.org/10.1364/OIC.2001.MD1


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Abstract

Cathodic arc deposition, combined with Ion-Assisted-Deposition (IAD), produces advanced optical and mechanical thin-films. For example, Amorphous Diamond-Like-Carbon (A-DLC), with hardness in excess of 70 GPa {diamond = 100 GPa), in multi-layer combination with Al2O3 have been deposited on temperature-sensitive substrates.

© 2001 Optical Society of America

OCIS Codes
(160.2100) Materials : Electro-optical materials
(310.1860) Thin films : Deposition and fabrication

Citation
M. Fulton, " Review of cathodic arc depositon," in Optical Interference Coatings, OSA Technical Digest Series (Optical Society of America, 2001), paper MD1.
http://www.opticsinfobase.org/abstract.cfm?URI=OIC-2001-MD1


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