Fast scanning ellipsometer for real-time inspection and characterization of surfaces

K. Rabinovich; G. Toker; A. Brunfeld

doi:10.1364/OIC.2001.ME7

Optical Interference Coatings
OSA Technical Digest Series (Optica Publishing Group, 2001),
paper ME7
•https://doi.org/10.1364/OIC.2001.ME7

Fast scanning ellipsometer for real-time inspection and characterization of surfaces

K. Rabinovich, G. Toker, and A. Brunfeld

Optical Interference Coatings 2001

Banff Canada
ISBN: 1-55752-682-6

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Monitoring and Process Control (ME)

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K. Rabinovich, G. Toker, and A. Brunfeld, "Fast scanning ellipsometer for real-time inspection and characterization of surfaces," in Optical Interference Coatings, OSA Technical Digest Series (Optica Publishing Group, 2001), paper ME7.

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Abstract

A fast multi-angle focused-beam ellipsometer utilizing a Zeeman laser, which is equivalent to a rotating polarizer in the megaherz range, is presented. The configuration is suitable for real-time inspection of large surfaces.

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