A fast multi-angle focused-beam ellipsometer utilizing a Zeeman laser, which is equivalent to a rotating polarizer in the megaherz range, is presented. The configuration is suitable for real-time inspection of large surfaces.
© 2001 Optical Society of America
G. Toker, K. Rabinovich, and A. Brunfeld, " Fast scanning ellipsometer for real-time surface inspection and characterization," in Optical Interference Coatings, OSA Technical Digest Series (Optical Society of America, 2001), paper ME7.
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