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Optics InfoBase > Conference Papers > OIC > 2001 > ME > Page ME7 © 2001 OSA

Conference Paper
Optical Interference Coatings
Banff Canada
July 15, 2001
ISBN: 1-55752-682-6
Monitoring and Process Control (ME)

Fast scanning ellipsometer for real-time surface inspection and characterization

Gregory Toker, K. Rabinovich, and A. Brunfeld

http://dx.doi.org/10.1364/OIC.2001.ME7


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Abstract

A fast multi-angle focused-beam ellipsometer utilizing a Zeeman laser, which is equivalent to a rotating polarizer in the megaherz range, is presented. The configuration is suitable for real-time inspection of large surfaces.

© 2001 Optical Society of America

OCIS Codes
(260.2130) Physical optics : Ellipsometry and polarimetry
(310.6860) Thin films : Thin films, optical properties

Citation
G. Toker, K. Rabinovich, and A. Brunfeld, " Fast scanning ellipsometer for real-time surface inspection and characterization," in Optical Interference Coatings, OSA Technical Digest Series (Optical Society of America, 2001), paper ME7.
http://www.opticsinfobase.org/abstract.cfm?URI=OIC-2001-ME7


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