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Conference Paper
Optical Interference Coatings
Banff Canada
July 15, 2001
ISBN: 1-55752-682-6
Coatings for EUV to UV Wavelengths I (ThA)

UV-Optical and microstructural properties of MgF2- and LaF3-coatings deposited by IBS and PVD processes

Detlev Ristau, Stefan Günster, Salvador Bosch, Josep Ferré-Borrull, Francesca Peiró, Angela Duparré, Enrico Masetti, George Kiriakidis, Etienne Quesnel, and Alexander Tikhonravov

http://dx.doi.org/10.1364/OIC.2001.ThA5


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Abstract

MgF2 and LaF3 are considered as materials of high potentiality for high quality coatings in the spectral range from 150 nm up to 250 nm. Results for these materials, which were investigated within an extended joint experiment of several European laboratories, are presented.

© 2001 Optical Society of America

OCIS Codes
(160.4670) Materials : Optical materials
(310.1860) Thin films : Deposition and fabrication

Citation
D. Ristau, S. Günster, S. Bosch, J. Ferré-Borrull, F. Peiró, A. Duparré, E. Masetti, G. Kiriakidis, E. Quesnel, and A. Tikhonravov, " UV-Optical and microstructural properties of MgF2- and LaF3-coatings deposited by IBS and PVD processes," in Optical Interference Coatings, OSA Technical Digest Series (Optical Society of America, 2001), paper ThA5.
http://www.opticsinfobase.org/abstract.cfm?URI=OIC-2001-ThA5


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