The instrumentation for total scatter measurement of VUV coatings uses a Coblentz sphere and excimer laser or deuterium lamp radiation. Forward scatter and backscatter measurements on calcium fluoride and AR and HR coatings are presented.
© 2001 Optical Society of America
J. Steinert, S. Gliech, M. Flemming, and A. Duparre, " Instrument for light scatter measurements at 157 nm and 193 nm," in Optical Interference Coatings, OSA Technical Digest Series (Optical Society of America, 2001), paper ThA8.
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