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Conference Paper
Optical Interference Coatings
Banff Canada
July 15, 2001
ISBN: 1-55752-682-6
Coatings for EUV to UV Wavelengths I (ThA)

Instrument for light scatter measurements at 157 nm and 193 nm

Joerg Steinert, Stefan Gliech, Marcel Flemming, and Angela Duparre


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The instrumentation for total scatter measurement of VUV coatings uses a Coblentz sphere and excimer laser or deuterium lamp radiation. Forward scatter and backscatter measurements on calcium fluoride and AR and HR coatings are presented.

© 2001 Optical Society of America

OCIS Codes
(120.5820) Instrumentation, measurement, and metrology : Scattering measurements
(260.7190) Physical optics : Ultraviolet

J. Steinert, S. Gliech, M. Flemming, and A. Duparre, " Instrument for light scatter measurements at 157 nm and 193 nm," in Optical Interference Coatings, OSA Technical Digest Series (Optical Society of America, 2001), paper ThA8.

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