Impact of surface roughness on spectral properties of thin films and multilayers

A. V. Tikhonravov; M. K. Trubetskov; A. A. Tikhonravov; A. Duparre

doi:10.1364/OIC.2001.ThB5

Optical Interference Coatings
OSA Technical Digest Series (Optica Publishing Group, 2001),
paper ThB5
•https://doi.org/10.1364/OIC.2001.ThB5

Impact of surface roughness on spectral properties of thin films and multilayers

A. V. Tikhonravov, M. K. Trubetskov, A. A. Tikhonravov, and A. Duparre

Optical Interference Coatings 2001

Banff Canada
ISBN: 1-55752-682-6

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Coatings for EUV to UV Wavelengths II (ThB)

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A. V. Tikhonravov, M. K. Trubetskov, A. A. Tikhonravov, and A. Duparre, "Impact of surface roughness on spectral properties of thin films and multilayers," in Optical Interference Coatings, OSA Technical Digest Series (Optica Publishing Group, 2001), paper ThB5.

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Abstract

It is shown that largo scale and small scale surface roughness harmonics impact the amplitude reflection and transmission coefficients of optical thin films in different ways. An effective calculation algorithm taking into account surface roughness effect is proposed.

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