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Conference Paper
Optical Interference Coatings
Banff Canada
July 15, 2001
ISBN: 1-55752-682-6
Materials and Properties of Optical Coatings (TuF)

Internal stress properties of fluoride thin films for VUV applications

Eri Fukumoto, Tomonori Aoki, and Shigetaro Ogura


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We deposited MgF2 and LaF3 films on quartz glass plates as anti-reflective coatings for VUV region, and report here their internal stress behavior, adopting in-situ stress measurement.

© 2001 Optical Society of America

OCIS Codes
(160.4670) Materials : Optical materials
(310.6870) Thin films : Thin films, other properties

E. Fukumoto, T. Aoki, and S. Ogura, " Internal stress properties of fluoride thin films for VUV applications," in Optical Interference Coatings, OSA Technical Digest Series (Optical Society of America, 2001), paper TuF9.

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