OSA's Digital Library

Optics InfoBase > Conference Papers > OIC > 2001 > TuF > Page TuF9 © 2001 OSA

Conference Paper
Optical Interference Coatings
Banff Canada
July 15, 2001
ISBN: 1-55752-682-6
Materials and Properties of Optical Coatings (TuF)

Internal stress properties of fluoride thin films for VUV applications

Eri Fukumoto, Tomonori Aoki, and Shigetaro Ogura

http://dx.doi.org/10.1364/OIC.2001.TuF9


View Full Text Article

Acrobat PDF (65 KB) Note that full-text PDFs from conferences typically contain 1-3 pages of content, some or all of which might be an abstract, summary, or miscellaneous items.





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations
  • Export Citation/Save Click for help

Abstract

We deposited MgF2 and LaF3 films on quartz glass plates as anti-reflective coatings for VUV region, and report here their internal stress behavior, adopting in-situ stress measurement.

© 2001 Optical Society of America

OCIS Codes
(160.4670) Materials : Optical materials
(310.6870) Thin films : Thin films, other properties

Citation
E. Fukumoto, T. Aoki, and S. Ogura, " Internal stress properties of fluoride thin films for VUV applications," in Optical Interference Coatings, OSA Technical Digest Series (Optical Society of America, 2001), paper TuF9.
http://www.opticsinfobase.org/abstract.cfm?URI=OIC-2001-TuF9


Sort:  Journal  |  Reset

References

References are not available for this paper.

OSA is a member of CrossRef.

CrossCheck Deposited