Abstract
The properties of oxide thin films deposited using oxygen-ion assisted deposition (IAD) were studied. The refractive index dispersion of a single TiO2, Ta2O5, HfO2, Al2O3 and SiO2 layer and the results of a multi-layer AR coatings with 633nm and 1315nm dual wavelength on sapphire substrate for COIL laser window have been reported. The 99.14% and 99.95% transmission at 633nm and 1315nm are obtained with Ta2O5/ SiO2 AR coatings deposited by IAD.
© 2004 Optical Society of America
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